Semiconductor Defect Review System Market Trends：the market size is projected to grow from USD 864 million in 2024 to USD 1425 million by 2031

Semiconductor inspection runs through the entire semiconductor process, that is, the front-end and back-end. Semiconductor inspection includes optical inspection, electron beam inspection and X-ray measurement. It mainly inspection whether there are abnormal quality conditions on the surface of the wafer or in the circuit structure, such as scratches, particle contamination, graphic errors and other defects. Different inspection technologies have obvious differences, mainly reflected in accuracy, speed and inspection purposes.

Semiconductor inspection types include patterned, non-patterned and mask inspection. Among them, patterned defect inspection is divided into bright field and dark field inspection. Both are analyzed through optical signals. The difference is that the bright field is a vertically reflected light signal, while the dark field is a scattered light signal.

With the advancement of semiconductor integrated circuit process nodes, the resolution of optical defect detection equipment, which is the main equipment for process control in wafer fabs, can no longer meet the needs of large-scale production and advanced process development. It is necessary to rely on higher-resolution electron beam review equipment for further review to clearly image defects and identify their types, thereby providing a basis for semiconductor process engineers to optimize process technology.

Defect review is a process that uses scanning electron microscope (SEM) or optical technology to carefully inspect defects on semiconductor wafers/masks. First, the defects on the wafer/mask are preliminarily identified by the defect detection system and their position coordinates are recorded in the file. Subsequently, these wafers/masks and test result files are loaded into the defect review equipment. The review equipment detects and accurately locates defects by comparing with the circuit patterns of adjacent molds and using differential image processing technology. Then, the review equipment automatically moves each defect to the center of the field of view and takes high-magnification images for further review and classification. This process mainly works in conjunction with the inspection systems of electronic equipment and other semiconductor production lines to ensure that defects are accurately identified and recorded.

According to the new market research report "Semiconductor Defect Review System - Global Market Share and Ranking, Overall Sales and Demand Forecast 2025-2031", published by QYResearch, the global Semiconductor Defect Review System market size is projected to grow from USD 864 million in 2024 to USD 1425 million by 2031, at a CAGR of 6.7% during the forecast period.

Figure00001. Global Semiconductor Defect Review System Top 9 Players Ranking and Market Share (Ranking is based on the revenue of 2024, continually updated)

Source: QYResearch, "Semiconductor Defect Review System - Global Market Share and Ranking, Overall Sales and Demand Forecast 2025-2031”

The global key manufacturers of Semiconductor Defect Review System include KLA, Applied Materials, Hitachi High-Tech, Lasertec, etc. In 2024, the global top five players had a share approximately 95% in terms of revenue.

Figure00002. Semiconductor Defect Review System, Global Market Share, Split by Product Segment

Source: QYResearch, "Semiconductor Defect Review System - Global Market Share and Ranking, Overall Sales and Demand Forecast 2025-2031”

In terms of product type, 5-7nm is the largest segment, hold a share of 33.98%.

About The Authors

Jiashi Dong

Lead Author

Email: dongjiashi@qyresearch.com

BM of QYResearch Nanning Research Center is also a key member of the semiconductor equipment and materials department of QYResearch. The main research areas include electronics, semiconductor equipment, materials, etc. Some of the sub-research topics include automotive diodes, automotive inductors, LiDAR, RF power supplies, discrete devices, Molding System, wafer defect detection and review equipment, 3D wafer AOI, precursors, electroplating equipment, semiconductor chemical plating solution, motors for semiconductor equipment, air bearing stages for semiconductor equipment, dry pumps for semiconductor equipment, semiconductor coating devices, etc. At the same time, it is also engaged in the development of market segmentation reports and participates in the writing of customized projects. Cooperating customers include Huawei, WalterFuse, Hitachi High-Tech, Towa, Mitsubishi Electric, HORIBA, Schaeffler, etc.

About QYResearch

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