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Semiconductor PECVD Equipment Analysis Report :the market size is projected to reach USD 12.67 billion by 2031
PECVD (Plasma-Enhanced Chemical Vapor Deposition) utilizes plasma energy to initiate and sustain CVD reactions. The system reaction pressure in PECVD is comparable to that in LPCVD (Low-Pressure Chemical Vapor Deposition), which explains why PECVD development closely follows LPCVD advancements. The key difference lies in their reaction temperatures - PECVD operates at significantly lower temperatures than LPCVD.
According to the new market research report “Semiconductor PECVD Equipment- Global Market Share and Ranking, Overall Sales and Demand Forecast 2025-2031”, published by QYResearch, the global Semiconductor PECVD Equipment market size is projected to reach USD 12.67 billion by 2031, at a CAGR of 7.0% during the forecast period.
Driving Forces of the Semiconductor PECVD Equipment Market
The semiconductor PECVD (Plasma-Enhanced Chemical Vapor Deposition) equipment market is primarily driven by the advancement of process nodes and the rapid growth of emerging semiconductor applications. As logic and memory chips continue to evolve toward 3nm and below, the demand for PECVD in critical processes such as ultra-low-κ dielectric films and SiN passivation layers has increased significantly. Meanwhile, the development of advanced packaging technologies (e.g., Fan-Out, 3D IC) has boosted the need for high-density dielectric layers. Additionally, capacity expansions in power semiconductors (SiC/GaN) and MEMS sensors have driven PECVD equipment procurement. Government policies (e.g., the U.S. CHIPS Act, China's Big Fund) further accelerate fab construction, providing long-term growth momentum for the equipment market.
Trends in the Semiconductor PECVD Equipment Market
Future PECVD equipment will move toward higher process precision and intelligence: On one hand, equipment manufacturers are adopting multi-chamber integrated designs to improve throughput and introducing ALD-like techniques for more uniform thin-film deposition. On the other hand, AI technology will be widely applied to optimize process parameters, enhancing production efficiency and yield. In terms of applications, logic/memory chips remain the dominant market, but advanced packaging and third-generation semiconductors are growing rapidly. Geographically, Chinese equipment suppliers are gradually overcoming technical barriers and making progress in mature nodes. In the long term, new semiconductor materials may create additional demand, though challenges such as process compatibility need to be addressed.
Figure00001. Global Semiconductor PECVD Equipment Market Size (US$ Million), 2024 vs 2031
Source: QYResearch, "Semiconductor PECVD Equipment- Global Market Share and Ranking, Overall Sales and Demand Forecast 2025-2031”
Figure00002. Global Semiconductor PECVD Equipment Top 11 Players Ranking and Market Share (Ranking is based on the revenue of 2024, continually updated)
Source: QYResearch, "Semiconductor PECVD Equipment- Global Market Share and Ranking, Overall Sales and Demand Forecast 2025-2031”
According to QYResearch Top Players Research Center, the global key manufacturers of Semiconductor PECVD Equipment include Applied Materials, Lam Research, etc. In 2024, the global top three players had a share approximately 79.0% in terms of revenue.
In terms of product type, currently 300 mm Wafer Size is the largest segment, hold a share of 72.4%.
In terms of product application, currently Foundry is the largest segment, hold a share of 65.6%.
About the Authors
About QYResearch
QYResearch founded in California, USA in 2007.It is a leading global market research and consulting company. With over 17 years’ experience and professional research team in various cities over the world QY Research focuses on management consulting, database and seminar services, IPO consulting (data is widely cited in prospectuses, annual reports and presentations), industry chain research and customized research to help our clients in providing non-linear revenue model and make them successful. We are globally recognized for our expansive portfolio of services, good corporate citizenship, and our strong commitment to sustainability. Up to now, we have cooperated with more than 60,000 clients across five continents. Let’s work closely with you and build a bold and better future.
QYResearch is a world-renowned large-scale consulting company. The industry covers various high-tech industry chain market segments, spanning the semiconductor industry chain (semiconductor equipment and parts, semiconductor materials, ICs, Foundry, packaging and testing, discrete devices, sensors, optoelectronic devices), photovoltaic industry chain (equipment, cells, modules, auxiliary material brackets, inverters, power station terminals), new energy automobile industry chain (batteries and materials, auto parts, batteries, motors, electronic control, automotive semiconductors, etc.), communication industry chain (communication system equipment, terminal equipment, electronic components, RF front-end, optical modules, 4G/5G/6G, broadband, IoT, digital economy, AI), advanced materials industry Chain (metal materials, polymer materials, ceramic materials, nano materials, etc.), machinery manufacturing industry chain (CNC machine tools, construction machinery, electrical machinery, 3C automation, industrial robots, lasers, industrial control, drones), food, beverages and pharmaceuticals, medical equipment, agriculture, etc.
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